Characteristic
▸ CNT (Carbon Nano Tube) & Drum Coating for Powder
▸ Long-distance coating possible by applying UBM
▸ Target efficiency (more than 40% based on Cr)
▸ Automation system and data storage
▸ System size: 3m(L) x 2.5m(W) x 2m(H)
▸ ISIS provides sputtering systems of various sizes and can be manufactured up to 72 inches.
