i40D |
i60FA |
i600S |
|
chamber size |
diameter 400 x 400H |
650x600x600 |
600x600x600 |
coating system |
Normal Arc |
Filtered Arc |
Sputtering |
uniformity |
135mm H x 3 axes |
130mm H x 6 axes |
300mm H x 6 axes |
MFC |
Ar, C2H2, N2 |
Ar, C2H2, N2 |
Ar, C2H2, N2 |
target |
5inch x 15mm t |
70mm dia x 12mm t |
16inch x 5 inch x12mmt |
Etching (cleaning method) |
Glow Discharge |
Ion Beam (6KW, DC) |
Glow Discharge |
buffer layer |
Cr |
none |
Cr |
coating thickness |
1um Below |
0.5um Below |
normal thickness |
Coated thin film characteristics |
smooth, Hard |
Very smooth, very hard |
Smooth, hard |
