Characteristic
▸ Hybrid method with combination of HCD, Arc and Sputter
▸ High and low temperature coating available
▸ Excellent surface finish
▸ Automation system and remote control(uniformity:8axesx520mmH)
▸ Easy target replacement and maintenance by adopting quick clamping method
▸ Save data and view real-time graphs
▸ System size: 3.2m(L) x 2.8m(W) x 2.3m(H)
▸ Option: Sputter (Target size: 558.8mm x 127mm x 12mm t)